JPH01129258U - - Google Patents
Info
- Publication number
- JPH01129258U JPH01129258U JP2483688U JP2483688U JPH01129258U JP H01129258 U JPH01129258 U JP H01129258U JP 2483688 U JP2483688 U JP 2483688U JP 2483688 U JP2483688 U JP 2483688U JP H01129258 U JPH01129258 U JP H01129258U
- Authority
- JP
- Japan
- Prior art keywords
- side bearing
- bearing body
- drive shaft
- drive
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988024836U JPH0538054Y2 (en]) | 1988-02-25 | 1988-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988024836U JPH0538054Y2 (en]) | 1988-02-25 | 1988-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01129258U true JPH01129258U (en]) | 1989-09-04 |
| JPH0538054Y2 JPH0538054Y2 (en]) | 1993-09-27 |
Family
ID=31245036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988024836U Expired - Lifetime JPH0538054Y2 (en]) | 1988-02-25 | 1988-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538054Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62102029U (en]) * | 1985-12-19 | 1987-06-29 |
-
1988
- 1988-02-25 JP JP1988024836U patent/JPH0538054Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62102029U (en]) * | 1985-12-19 | 1987-06-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538054Y2 (en]) | 1993-09-27 |